An apparatus for supercritical processing of multiple workpieces comprises a
transfer
module, first and second supercritical processing modules, and a robot. The transfer
module includes an entrance. The first and second supercritical processing modules
are coupled to the transfer module. The robot is preferably located with the transfer
module. In operation, the robot transfers a first workpiece from the entrance of
the transfer module to the first supercritical processing module. The robot then
transfers a second workpiece from the entrance to the second supercritical processing
module. After the workpieces have been processed, the robot returns the first and
second workpieces to the entrance of the transfer module. Alternatively, the apparatus
includes additional supercritical processing modules coupled to the transfer module.
