A transfer robot (5) for thin substrate capable of efficiently detecting
the stored state of thin substrates and an inspection method for thin substrate
capable of accurately detecting the stored state of thin substrates; the robot
(5), comprising an inspection camera (1) for detecting the stored
state of the thin substrates (3) in a storage cassette (2), wherein
the plurality of thin substrates (3) stored in the storage cassette (2)
are carried out from the storage cassette (2) by the robot.