A nonvolatile semiconductor memory device includes a NAND memory cell array,
booster
circuit, row decoder, bit line control circuit and column decoder. In the device,
the magnitude of intermediate voltage applied to the control gates of memory transistors
from the booster circuit via the row decoder is changed according to the position
of a selected control gate line when data is sequentially programmed into the memory
transistors in the memory cell array. Alternatively, a plurality of different intermediate
voltages are applied when data is simultaneously programmed into memory transistors
connected to the selected control gate line.