The present invention relates to a ferroelectric memory having a matrix-type
memory cell array which has a superior degree of integration, in which the angularity
of the ferroelectric layer's hysteresis curve is improved, the production yield
is increased and costs are reduced.
A ferroelectric memory having improved angularity in the hysteresis curve, and
superior memory characteristics, production yield and costs is realized as follows.
Namely, a peripheral circuit chip and a memory cell array chip are engaged onto
an inexpensive assembly base 300 such as glass or plastic. In memory cell
array chip 200, a ferroelectric layer is made to undergo epitaxial growth
on to a Si single crystal via a buffer layer and first signal electrode. As a result,
a ferroelectric memory can be realized which has improved angularity in the hysteresis
curve and superior memory characteristics, production yield, and cost.