This invention provides a method of making nano-scaled toroidal magnetic memory
cells, such as may be used, for example, in magnetic random access memory (MRAM).
In a particular embodiment a semiconductor wafer substrate is prepared and a conductor
layer is provided upon the wafer. A hard layer is deposited upon the first conductor.
From the hard layer, ion etching is employed to form an annular wall about a pillar,
the wall and pillar defining an annular slot. A ferromagnetic data layer is deposited
within the annular slot and a junction stack is then provided upon at least a portion
of the data layer. A dielectric is applied to insulate the structure and then planarized
to expose the pillar.