The invention provides a miniaturized optical column for a charged particle beam
apparatus for examining a specimen (14). The column is constituted by, among
other things, a charged particle source (2) for providing a beam of charged
particles (10); a lens system for guiding the beam of charged particles
(10) from the source (2) onto the specimen (14); and a housing
(40) which, during operation, is set on beam boost potential.