Provided are a resist material having markedly high resolution and etching
resistance of a practically usable level, and being useful for fine microfabrication;
a patterning method using the resist material; and a polymer useful as a base resin
for the resist material. More specifically, provided are a polymer having a weight-average
molecular weight of 1,000 to 500,000, which comprises one or more repeating units
selected from the group consisting of repeating units represented by formulae (1)
to (3) below; and one or more repeating units of the formula (4) below; and a resist
material containing the polymer.
##STR1##