A microelectromechanical device and method of fabricating the same, including
a
layer of patterned and deposited metal or mechanical-quality, doped polysilicon
inserted between the appropriate device element layers, which provides a conductive
layer to prevent the microelectromechanical device's output from drifting. The
conductive layer may encapsulate of the device's sensing or active elements, or
may selectively cover only certain of the device's elements. Further, coupling
the metal or mechanical-quality, doped polysilicon to the same voltage source as
the device's substrate contact may place the conductive layer at the voltage of
the substrate, which may function as a Faraday shield, attracting undesired, migrating
ions from interfering with the output of the device.