A micro-miniature x-ray apparatus comprises: a first chip subassembly including
a source of x-rays including both Bremsstrahlung photons and characteristic x-rays;
a second chip subassembly including a filter for transmitting the characteristic
x-rays and blocking the Bremsstrahlung photons; a third chip subassembly including
a movable element for focusing or collimating the transmitted characteristic x-rays
into a beam and means for controlling the position of the focusing element. In
one embodiment, the controlling means include a micro-electromechanical system
(MEMS). In another embodiment, the position of the movable element determines how
the x-ray beam is steered to the focal area. In still another embodiment, the x-ray
source includes a field emitter electron source and a target responsive to the
electrons for generating x-rays. In this case, the x-ray beam is also steered by
selectively energizing the anode segments. In yet another embodiment, the movable
element includes a Fresnel zone plate; in still another embodiment it includes
an array of poly-capillaries. Advantageously, our x-ray source, including its focusing,
collimating and steering components, can be fabricated small enough to be mounted
at the end of a catheter. In addition, in some embodiments it can also fabricated
sufficiently inexpensively to be disposable after each use.