The invention consists of an evaporative cooling device comprising one or more
microchannels whose cross section is axially reduced to control the maximum capillary
pressure differential between liquid and vapor phases. In one embodiment, the evaporation
channels have a rectangular cross section that is reduced in width along a flow
path. In another embodiment, channels of fixed width are patterned with an array
of microfabricated post-like features such that the feature size and spacing are
gradually reduced along the flow path. Other embodiments incorporate bilayer channels
consisting of an upper cover plate having a pattern of slots or holes of axially
decreasing size and a lower fluid flow layer having channel widths substantially
greater than the characteristic microscale dimensions of the patterned cover plate.
The small dimensions of the cover plate holes afford large capillary pressure differentials
while the larger dimensions of the lower region reduce viscous flow resistance.