Wafer-level electronic packages having waveguides and methods of fabricating
chip-level electronic packages having waveguides are disclosed. A representative
chip-level electronic package includes at least one waveguide having a waveguide
core. In addition, another representative chip-level electronic package includes
a waveguide having an air-gap cladding layer around a portion of the waveguide
core. A representative method for fabricating a chip-level electronic package includes:
providing a substrate having a passivation layer disposed on the substrate; disposing
a waveguide core on a portion of the passivation layer; disposing a first sacrificial
layer onto at least one portion of the passivation layer and the waveguide core;
disposing an overcoat layer onto the passivation layer and the first sacrificial
layer; and removing the first sacrificial layer to define an air-gap cladding layer
within the overcoat polymer layer and around a portion of the waveguide core.