The invention encompasses a semiconductor processing method of cleaning a surface
of a copper-containing material by exposing the surface to an acidic mixture comprising
Cl-, NO3- and F-. The invention also
includes a semiconductor processing method of forming an opening to a copper-containing
substrate. Initially, a mass is formed over the copper-containing substrate. The
mass comprises at least one of a silicon nitride and a silicon oxide. An opening
is etched through the mass and to the copper-containing substrate. A surface of
the copper-containing substrate defines a base of the opening, and is referred
to as a base surface. The base surface of the copper-containing substrate is at
least partially covered by at least one of a copper oxide, a silicon oxide or a
copper fluoride. The base surface is cleaned with a cleaning solution comprising
hydrochloric acid, nitric acid and hydrofluoric acid to remove at least some of
the at least one of a copper oxide, a silicon oxide or a copper fluoride from over
the base surface.