Transition metal doped II-V nitride material films exhibit ferromagnetic
properties at or above room temperature. A III-V nitride material film may be doped
with a transition metal film in-situ during metal-organic chemical vapor deposition
and/or by solid-state diffusion processes. Doping of the III-V nitride material
films may proceed in the absence of hydrogen and/or in the presence of nitrogen.
In some embodiments, transition metal-doped III-V nitride material films comprise
carbon concentrations of at least 1017 atoms per cubic centimeter.