A step (1) of heating a fluoronickel compound to release a fluorine gas, a step
(2) of allowing a fluorine gas to be occluded into a fluorinated compound, and
a step (3) of heating the fluoronickel compound and reducing an inner pressure
are conducted in a container, respectively, at least once, and thereafter a high-purity
fluorine gas is obtained in the step (1). Also, a step (5) of heating a fluoronickel
compound and reducing an inner pressure and a step (6) of allowing a fluorine gas
reduced in a hydrogen fluoride content to be occluded into the fluoronickel compound
are conducted in a container having a fluorinated layer formed on its surface,
respectively, at least once, the step (5) is further conducted, and thereafter
a fluorine gas containing impurity gases is contacted with the fluoronickel compound
to fix and remove the fluorine gas, and the impurities are analyzed by gas chromatography.