There is disclosed a semiconductor apparatus comprising a semiconductor substrate
having a first region and a second region isolated from the first region, a first
semiconductor device which is formed in the first region and which includes a first
gate insulating film of a silicon oxide single film formed on the semiconductor
substrate, and a first gate electrode formed on the first gate insulating film,
and a second semiconductor device which is formed in the second region and which
includes a second insulating film of a single layer made of an insulating material
of a dielectric constant different from that of the silicon oxide film, and a second
gate electrode formed on the second gate insulating film.