The movement and mixing of microdroplets through microchannels is described employing silicon-based microscale devices, comprising microdroplet transport channels, reaction regions, electrophoresis modules, and radiation detectors. The discrete droplets are differentially heated and propelled through etched channels. Electronic components are fabricated on the same substrate material, allowing sensors and controlling circuitry to be incorporated in the same device.

 
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< FeRAM capacitor stack etch

< Very low dielectric constant plasma-enhanced CVD films

> Method of formation of semiconductor resistant to hot carrier injection stress

> Guard ring structure for a Schottky diode

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