A method for inspecting leakage of a container includes a differential pressure
generation step of generating a differential pressure between the inside and the
outside of a container; an ozone gas addition step of adding ozone gas to a higher
pressure side of the inside and the outside; an ozone concentration detection step
of measuring an ozone concentration of a lower pressure side of the inside and
the outside; and a leakage determination step of determining presence of the leakage
of the container based on a change in the ozone concentration.