In a semiconductor device manufacturing process using a low-dielectric-constant
insulation film as an interlayer insulation film, a stress exerted on wiring layers
and interlayer insulation films is reduced. In a semiconductor device in which
a plurality of buried wiring layers are formed in the interlayer insulation films
each formed of a low-dielectric-constant insulation film lower in mechanical strength
than a silicone oxide film formed by, for example, a CVD method, a first layer
of wiring, on a lower layer of which a low-dielectric-constant insulation film
is not disposed, serves as a bonding pad, and bump electrodes are formed on the
wiring so as to become higher than a position where the uppermost buried wiring
is formed.