To provide a semiconductor device having copper wiring layers and organic insulating
resin layers with less separation and its manufacture method.
A semiconductor device has: a semiconductor substrate formed with a number of
semiconductor
elements; a first interlayer insulating film formed above the semiconductor substrate
and having a first wiring recess; a first copper wiring embedded in the first wiring
recess; a second interlayer insulating film having a second wiring recess, the
second interlayer insulating film including a copper diffusion preventing layer
formed on the first copper wiring and the first interlayer insulating film, an
oxide film formed on the copper diffusion preventing layer, and an organic insulating
resin layer formed on the oxide film; and a second copper wiring embedded in the
second wiring recess.