The invention is directed to chemical-mechanical polishing pads comprising a
transparent window. In one embodiment, the transparent window comprises an inorganic
material and an organic material, wherein the inorganic material comprises about
20 wt. % or more of the transparent window. In another embodiment, the transparent
window comprises an inorganic material and an organic material, wherein the inorganic
material is dispersed throughout the organic material and has a dimension of about
5 to 1000 nm, and wherein the transparent window has a total light transmittance
of about 30% or more at at least one wavelength in the range of about 200 to 10,000
nm. In yet another embodiment, the transparent window comprises an inorganic/organic
hybrid sol-gel material. In an additional embodiment, the transparent window comprises
a polymer resin and a clarifying material, wherein the transparent window has a
total light transmittance that is substantially higher than a window comprising
only the polymeric resin.