A method, system and medium are provided for enabling improved feedback and feedforward
control. An error, or deviation from target result, is observed during manufacture
of semi conductor chips. The error within standard deviation is caused by two components:
a white noise component and a signal component (such as systematic errors). The
white noise component is random noise and therefore is relatively non-controllable.
The systematic error, in contrast, may be controlled by changing the control parameters.
A ratio between the two components is calculated autoregressively. Based on the
ratio and using the observed or measured error, the actual value of the error caused
by the signal component is calculated utilizing an autoregressive stochastic sequence.
The actual value of the error is then used in determining when and how to change
the control parameters. The autoregressive stochastic sequence addresses the issue
of real-time control of the effects of run-to-run deviations, and provides a mechanism
that can extract white noise from the statistical process variance in real time.
This results in an ability to provide tighter control of feedback and feedforward variations.