Structures and methods for programmable array type logic and/or memory
devices with asymmetrical low tunnel barrier intergate insulators are provided.
The programmable array type logic and/or memory devices include non-volatile memory
which has a first source/drain region and a second source/drain region separated
by a channel region in a substrate. A floating gate opposing the channel region
and is separated therefrom by a gate oxide. A control gate opposes the floating
gate. The control gate is separated from the floating gate by an asymmetrical low
tunnel barrier intergate insulator. The asymmetrical low tunnel barrier intergate
insulator includes a metal oxide insulator selected from the group consisting of
Al2O3, Ta2O5, TiO2, Zro2,
Nb2O5, SrBi2Ta2O3, SrTiO3,
PbTiO3, and PbZrO3. The floating gate includes a polysilicon
floating gate having a metal layer formed thereon in contact with the low tunnel
barrier intergate insulator. And, the control gate includes a polysilicon control
gate having a metal layer, having a different work function from the metal layer
formed on the floating gate, formed thereon in contact with the low tunnel barrier
intergate insulator.