Optical imaging systems and methods use polarized illumination and a coordinated
pupil filter to achieve high contrast. An imaging system includes a light source
to generate light for illuminating an object having features aligned in a first
direction and features aligned in a second direction, a lens for imaging the illuminated
object onto a surface, a spatial selection device, such as a pupil filter, selective
in a first mode of light corresponding to features of the illuminated object aligned
in the first direction and selective in a second mode of light corresponding to
features of the illuminated object aligned in a second direction, a polarization
device optically coupled to the spatial selection device and selective in the first
mode of s-polarized light corresponding to the first direction and selective in
the second mode of s-polarized light corresponding to the second direction, and
a controller for selecting operation in the first mode or in the second mode.