Outflow of heat generated by a linear motor to the outside is suppressed.
A linear motor according to the present invention is a linear motor used in a vacuum
atmosphere, including a stator, a movable element movable relative to the stator,
and a metal film formed on the surface of at least one of the stator and the movable
element. This decreases the emissivity and reduces the outflow of heat by radiation
from the linear motor.