A three-dimensional (3-D) integrated chip system is provided with a first wafer
including one or more integrated circuit (IC) devices; a second wafer including
one or more integrated circuit (IC) devices; and a metal bonding layer deposited
on opposing surfaces of the first and second wafers at designated locations to
establish electrical connections between active IC devices on the first and second
wafers and to provide metal bonding between the adjacent first and second wafers,
when the first wafer is pressed against the second wafer using a flexible bladder
press to account for height differences of the metal bonding layer across the opposing
surfaces of the first and second wafers.