A semiconductor device includes a substrate and a gate region on top of a substrate. First and second gate sidewall liners are situated on first and second sides of the gate region respectively, the first and second sidewall liners having a vertical part contacting sidewalls of the gate region and a horizontal part contacting the substrate. First and second recessed spacers are situated on top of the first and second sidewall liners respectively. The height of the first and second spacers is lower than the height of the gate sidewall liner whereas the width of the horizontal part of the sidewall liner is shorter than the width of the spacer.