An x-ray laminography imaging system and a positioning system to be used therewith.
The positioning system is configured to move the object in the X, Y and Z-directions
(i.e., pitch and roll) to ensure that the object planes of the object that are
being imaged are at least substantially parallel to the focal plane of the imaging
system. The object is positioned so that object planes associated with the X, Y
and Z-coordinates of points along the contour of the surface of the object are
at least substantially parallel to the focal plane of the imaging system during
imaging of the object plane. Because some objects, such as printed circuit boards,
for example, are sometimes warped, by ensuring that the object plane being imaged
is at least substantially parallel to the focal plane of the imaging system, precise
laminographs are obtained. The preciseness of the laminographs ensures that the
cross-sectional slices of the object are accurate, which improves the robustness
of an inspection system that uses x-ray laminography to inspect objects.