In lithography applications, it is desirable to control, for example, a position
or width of a printed line. An effective method of controlling these patterns and
their resolution is by having as many grayscale levels as possible. The present
invention comprises methods of grayscaling wherein modulation of the exposure time
increases the number of grayscale levels on an object. In addition, the present
invention comprises methods of grayscaling wherein modulating the power of an exposure
beam provides additional grayscale levels.