Disclosed herein is a technique for forming a high quality ohmic contact
utilizable in the fabrication of short-wavelength light emitting diodes (LEDs)
emitting blue and green visible light and ultraviolet light, and laser diodes (LDs)
using a gallium nitride (GaN) semiconductor.
The ohmic contact is formed by depositing a nickel (Ni)-based solid solution
on top of a p-type gallium nitride semiconductor. The ohmic contact thus formed
has an excellent current-voltage characteristic and a low specific contact resistance
due to an increased effective carrier concentration around the surface of the gallium
nitride layer, as well as a high transmittance in the short-wavelength region.