A array of multi-bit Read Only Memory (ROM) cells is in a semiconductor substrate
of a first conductivity type with a first concentration. Each ROM cell has a first
and second regions of a second conductivity type spaced apart from one another
in the substrate. A channel is between the first and second regions. The channel
has three portions, a first portion, a second portion and a third portion. A gate
is spaced apart and is insulated from at least the second portion of the channel.
Each ROM cell has one of a plurality of N possible states, where N is greater than
2. The state of each ROM cell is determined by the existence or absence of extensions
or halos that are formed in the first portion of the channel and adjacent to the
first region and/or in the third portion of the channel adjacent to the second
region. These extensions and halos are formed at the same time that extensions
or halos are formed in MOS transistors in other parts of the integrated circuit
device, thereby reducing cost. The array of ROM cells are arranged in a plurality
of rows and columns, with ROM cells in the same row having their gates connected
together. ROM cells in the same column have the first regions connected in a common
first column, and second regions connected in common second column. Finally, ROM
cells in adjacent columns to one side share a common first column, and cells in
adjacent columns to another side share a common second column.