A dual-damascene process where first alternate ILDs are made of a first material
and second alternate ILDs are made of a second material. Each material is etchable
at a faster rate than the other in the presence of different etchant such as for
an organic polymer and an inorganic low k material. This allows the ILDs to be
deposited alternately on one another without an etchant stop layer thereby reducing capacitance.