Structures and methods are provided for an improved multilevel wiring
interconnect in an integrated circuit assembly. The present invention provides
for a multilayer copper wiring structure by electroless, selectively deposited
copper in a streamlined process which further reduces both intra-level line to
line capacitance and the inter-level capacitance.
In particular, an illustrative embodiment of the present invention includes a
novel methodology for forming multilevel wiring interconnects in an integrated
circuit assembly. The method includes forming a number of multilayer metal lines,
e.g. copper lines formed by selective electroless plating, separated by air gaps
above a substrate. A low dielectric constant material is deposited between the
number of metal lines and the substrate using a directional process. According
to the teachings of the present invention, using a directional process includes
maintaining a number of air gaps in the low dielectric constant material. Structures
and systems are similarly included in the present invention.