A package for an optoelectronic device includes a hermetically sealed cavity
into
which a mirror or other optical element is integrated. For a side-emitting laser,
an integrated mirror turns the light emitted from the laser inside the cavity so
that the light exits through a top surface of the package. The packaging can be
implemented for individual lasers or at the wafer level. A wafer level process
fabricates sub-mounts in a first wafer, fabricates depressions with reflective
areas in a second wafer, electrically connects optoelectronic devices to respective
sub-mounts on the first wafer, and bonds a second wafer to the first wafer with
the lasers hermetically sealed in cavities corresponding to the depressions in
the second wafer. The reflective areas in the depressions act as turning mirrors
for side emitting lasers.