Plasma discharge sources for generating emissions in the VUV, EUV and X-ray
spectral regions. Embodiments can include running a current through liquid jet
streams within space to initiate plasma discharges. Additional embodiments can
include liquid droplets within the space to initiate plasma discharges. One embodiment
can form a substantially cylindrical plasma sheath. Another embodiment can form
a substantially conical plasma sheath. Another embodiment can form bright spherical
light emission from a cross-over of linear expanding plasmas. All the embodiments
can generate light emitting plasmas within a space by applying voltage to electrodes
adjacent to the space. All the radiative emissions are characteristic of the materials
comprising the liquid jet streams or liquid droplets.