The present embodiment provides for methods and systems for use in
processing objects such as wafers, including polishing and/or grinding
wafers. Some embodiments provide systems that include a front-end module
and a processing module. The front end module couples with a storage
device that stores objects for processing. The front-end module can
comprise a single robot, a transfer station, and a plurality of end
effectors. The processing module is coupled with the front-end module
such that the single robot delivers objects from the storage device to
the processing module. The processing module comprising a rotating table,
and a spindle with a carrier configured to retrieve the delivered object
and process the object on the rotating table.