One embodiment of the present invention provides a system that controls rippling
caused by optical proximity correction during an optical lithography process for
manufacturing an integrated circuit. During operation, the system selects an evaluation
point for a given segment, wherein the given segment is located on an edge in the
layout of the integrated circuit. The system also selects a supplemental evaluation
point for the given segment. Next, the system computes a deviation from a target
location for the given segment at the evaluation point. The system also computes
a supplemental deviation at the supplemental evaluation point. Next, the system
adjusts a bias for the given segment, if necessary, based upon the deviation at
the evaluation point. The system also calculates a ripple for the given segment
based upon the deviation at the evaluation point and the supplemental deviation
at the supplemental evaluation point. If this ripple exceeds a threshold value,
the system performs a ripple control operation.