The present invention provides a positive photosensitive resin composition which
can be developed with a tetramethylammonium hydroxide aqueous solution with a usual
concentration, has high sensitivity and excellent resolution, and is excellent
in heat resistance, planarization properties, transparency, low water absorption
or the like. Further, the present invention provides a method for arbitrarily forming
a pattern having a semicircular or trapezoidal section by using the composition.
The positive photosensitive resin composition of the present invention comprises
an alkali-soluble resin, a 1,2-quinone diazide compound, a crosslinking compound
having at least two epoxy groups and a surfactant, and the alkali-soluble resin
is a copolymer comprising a carboxylic group-containing acrylic monomer, a hydroxyl
group-containing acrylic monomer and an N-substituted maleimide as essential components.
By changing the postbake conditions, the composition can arbitrarily form a pattern
having a semicircular or trapezoidal section.