A lift/tilt assembly for use in a semiconductor wafer processing device is set
forth. The lift/tilt assembly includes a linear way comprising a fixed frame and
a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably
connected to the moveable frame. The nest rotates between a wafer-horizontal orientation
and a wafer-vertical orientation as it is driven with the movable frame by a motor
that is coupled to the linear way. A lever connected to the nest provides an offset
from true vertical for the nest when the nest is in the wafer-vertical orientation.