A load port comprises a platform for receiving a FOUP. The platform includes features for manually removing a FOUP door. The platform also includes features for placing the FOUP in operative relation to a wafer transfer robot configured to transfer wafers between first and second containers.

 
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> System for handling of wafers within a process tool

> Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
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