A catadioptric projection lens configured for imaging a pattern arranged in an
object plane (2) onto an image plane (4) while creating a single,
real, intermediate image (3) has a catadioptric imaging group (5)
having a concave mirror (6) and a beam-deflector (7), and a dioptric
imaging lens group (20) that commences after the beam-deflector. The system
is configured such that the intermediate image follows the first lens (17)
of a dioptric section (8) and is preferably readily accessible. Arranging
the intermediate image both between a pair of lenses (17, 21) of the dioptric
section and at a large distance behind the final reflective surface of the beam-deflector
helps to avoid imaging aberrations.