A system for processing a workpiece includes an inner chamber pivotably supported
within an outer chamber. The inner chamber has an opening to allow liquid to drain
out. A motor pivots the inner chamber to bring the opening at or below the level
of liquid in the inner chamber. As the inner chamber turns, liquid drains out.
Workpieces within the inner chamber are supported on a holder or a rotor, which
may be fixed or rotating. Multi processes may be performed within the inner chamber,
reducing the need to move the workpieces between various apparatus and reducing
risk of contamination.