The safe-operating area (SOA) in a heterojunction bipolar transistor (HBT) is
improved by providing a collector region in the transistor having a graded (uniformly
or stepped) doping between the base region and the underlying subcollector region
with the collector doping being lower near the base and higher near the subcollector
and with the collector doping being less than the doping of the subcollector. The
non-uniformly doped collector reduces Kirk effect induced breakdown when collector
current increases.