A semiconductor laser element that has window regions at its opposite end faces
and an electrode portion superposed on an inner portion of the upper surface thereof
to include covering an inner portion of the upper surfaces of the window regions
without covering the entire upper surfaces of the window regions, by aligning a
photomask for forming electrode pattern segments at a predetermined position over
a laser substrate, which includes a plurality of element regions in a matrix pattern
and a plurality of window region pattern stripes corresponding to the window regions
of the element regions, the electrode pattern segments being used for forming electrodes
at predetermined positions between the adjacent window region pattern stripes,
wherein the photomask includes: an electrode pattern region for forming the electrode
pattern segments; and an auxiliary mask having a scale section for measuring the
amount of alignment deviation of the electrode pattern segments with respect to
the window region pattern.