Semiconductor devices including a non-volatile memory transistor and
methods for manufacturing such semiconductor devices are described. One semiconductor
device may include a silicon substrate 10, a floating gate 22 disposed
above the silicon substrate 10 through a first dielectric layer 20,
a second dielectric layer 26 that contacts at least a part of the floating
gate 22, a control gate 28 formed over the second dielectric layer
26, and a source region 14 and a drain region 16 formed in
the silicon substrate 10. A wiring layer 40 is provided above the
floating gate 22, and the entirety of the floating gate 22 is overlapped
by the wiring layer 40 as viewed in a plan view.