An integrated thin film capacitive element comprising a dielectric material of
the specified composition that exhibits increased voltage tunability of capacitance
and capacitance density and a production process thereof are disclosed. The integrated
thin film capacitive element comprises a capacitor structure constituted from a
lower electrode, a dielectric layer comprised of the high dielectric constant material
represented by the formula: (Ba(1-y)(1-x)Sr(1-y)xYy)Ti1+zO3+
with the range 0x1, 0.007y0.02, -10.5,
and (Ba(1-y)(1-x)+Sr(1-y)x)/Ti1+z1, and
an upper electrode. An electronic device comprising the capacitive element of the
present invention is also disclosed.