The invention includes methods of forming openings extending through electrically
insulative layers to electrically conductive materials. In an exemplary aspect,
a substrate is provided which supports a stack and an electrical node. The stack
comprises an electrically insulative cap over an electrically conductive material.
An electrically insulative layer is formed over the stack and over the electrical
node. A first etch is utilized to etch through the electrically insulative layer
to the electrical node and to the electrically insulative cap. The first etch etches
partially into the electrically insulative cap but does not etch entirely through
the electrically insulative cap. A second etch is utilized after the first etch
to etch entirely through the electrically insulative cap to the electrically conductive
material of the stack.