Tertiary alcohol compounds of formula (1) are novel wherein R1 and
R2 are C1-10 alkyl groups which may have halogen substituents, or R1
and R2 may form an aliphatic hydrocarbon ring, Y and Z are a single
bond or a divalent C1-10 organic group, and k=0 or 1. Using the tertiary alcohol
compounds as a monomer, polymers are obtained. A resist composition comprising
the polymer as a base resin is sensitive to high-energy radiation and has excellent
sensitivity, resolution, etching resistance and substrate adhesion
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