Thin film for optical applications, light-emitting structure using the same
and the fabrication method thereof are disclosed. The present invention provides
a silica or silica-related thin film for optical applications in which silicon
nanoclusters and rare earth elements are co-doped. The average size of the silicon
nanoclusters is less than 3 nm and the concentration of the rare earth elements
is less than 0.1 atomic %. The ratio of the rare earth element concentration to
that of silicon nanoclusters is controlled to range from 1 to 10 in the thin film.
The thin film emits light by exciting the rare earth elements through electron-hole
recombinations in the silicon nanoclusters. According to the present invention,
the conditions such as the size and concentration of the silicon nanoclusters,
the concentration of the rare earth element, and their concentration ratio are
specifically optimized to fabricate optical devices with better performance.