An apparatus and method incorporating at least two sensors that detect the
presence of substrate defects, such as breakage or misalignment, along
the lengths of at least two parallel edges of a moving substrate. In one
embodiment, an apparatus for detecting substrate defects includes a
sensor arrangement including at least two sensors that continuously sense
a substrate near at least two parallel edges of the substrate as the
substrate passes the sensors. In another embodiment, an apparatus for
detecting substrate defects includes a robot having a substrate support
surface, and a sensor arrangement including at least two sensors that
continuously sense a substrate near at least two parallel edges of the
substrate during substrate transfer on the substrate support surface. In
another embodiment, a method of continuously detecting substrate defects
includes positioning at least two sensors to continuously sense a
substrate near at least two parallel edges of the substrate as the
substrate passes the sensors, and transmitting a signal from each of the
at least two sensors to a controller that continuously monitors the
signals from the at least two sensors to detect the presence of a
substrate defect.