The present invention provides a lithographic apparatus including an
illumination system configured to condition a radiation beam; a
patterning device support constructed to support a patterning device, the
patterning device placed on the patterning device support being capable
of imparting the radiation beam with a pattern in its cross-section to
form a patterned radiation beam; a substrate table constructed to hold a
substrate; a projection system configured to project the patterned
radiation beam onto a target portion of the substrate, and a patterning
device handling apparatus, including a single robot for exchanging a
patterning device with the patterning device support and a loading
station, wherein the robot includes a first holding device configured to
hold a patterning device in a first holding position and a second holding
device configured to hold a patterning device in a second holding
position. Such single robot makes a rapid and accurate exchange of
patterning devices possible.